FALA's reticle and wafer EFEM's transfer substrates cleanly from carrier to semiconductor process and back again in both atmospheric and vacuum enviroments. We tailor interfaces to OEM equipment by integrating software and hardware with robotic handlers, alignment fixtures/nests, Endeffectors (arms and grips), Class 1 enclosures, loadports, operator screens with controls, interlocks and electrical power system backbones. |