Fala Technologies EFEM Advancement



DCT Diagram

In response to customers' increasing need to apply "front-end automation" to their existing R & D semiconductor equipment, Fala Technologies Inc. has expanded its turnkey product offerings to include custom Equipment Front End Modules (EFEMs). Aimed at applications requiring ultra-clean work cell automation - including satellite-based production, inspection and metrology systems - customized EFEMs best fulfill today's stringent nanoscience requirements.

During the past three years, Fala Technologies Inc. has been collaborating with leading R & D scientists on the development of nanoscience equipment and processes. This has allowed us to develop the in-depth knowledge and experience needed to supply the demand for next-generation design of ultra-clean, automated work cell environments.

As these advances are applied to process equipment, it is essential that they also migrate to the EFEM side of the equation. This is where the product is most vulnerable, as it is exposed to particle generation during atmosphere-to-atmosphere and atmosphere-to-vacuum transfers.

Fala Technologies Inc. specializes in the design, build and systems integration of custom EFEMs in order to address these needs for the R & D semiconductor and laboratory equipment fields.

We provide the expertise needed to evaluate the application, determine the requirements and execute a strategy to remove contamination, eliminate human handling, and improve product yield.

Custom EFEM Features:

Work Cell
Bullet Sub-Class 1 environments with zero dead space
Bullet Mirror-finished, monolithic interiors
Bullet Ionization, lighting, test ports and fool-proof safety interlocking
Bullet High-performance, closed-loop fan filter modules
Bullet Hinged or fixed BOLTS-compliant load ports

System
Bullet Support for reticles (masks), 200mm & 300mm wafers, and custom materials
Bullet Supervisor / slave system control options
Bullet Architectural flexibility
Bullet Robust operator interface options
Bullet GEM/SEC/HSMS Options
Bullet Self-contained / integrated Load Lock and supporting vacuum system
Bullet Self-contained packaging in support of parent tool automation requirements
Bullet Automation follow-through with full parent tool integration (sensors, interlocks, etc.)
Bullet Vibration isolation
Bullet Customer-preferred sub-system component brand flexibility
Bullet Leading-edge technology components
Bullet Single-point facilities interface and distribution to all points of use

Support
Bullet Enhanced service access and configurability
Bullet Extended warrantee / service contracts
Bullet Designed for SEMI compliance


The following are examples of Fala custom EFEMs in use at Sematech, Albany:

Defect Control Tool

Product: Coated and uncoated EUV Reticles
Product Interface: Asyst Load Port
Carriers: Single-reticle pods
Robot: Four-axis SCARA robot
End Effector: Active, contacts side surface face only
Work Cell: Sub-Class 1 with zero dead space

Vacuum System:
Bullet Integrated Load Lock
Bullet 24" x 28" x 14" Chamber
Bullet Base pressure of 10-6n Torr
Bullet Load lock pumping: roughing and turbo-molecular pumps
Bullet Load lock gases: Argon purge and Nitrogen pressure control
Bullet Chamber pumping: roughing and turbo-molecular pumps
Bullet Chamber gases: Argon purge and Nitrogen pressure control
Bullet Vacuum stage with 18" of travel
Bullet Active reticle chuck riding on the vacuum stage


Metrology System

Product: Coated and uncoated EUV Reticles
Product Interface: Dual Asyst Load Ports
Carriers: Single-reticle pods and Five-reticle cassettes
Robot: Six-axis Staubli robot
End Effector: Passive, for interfacing with multi-reticle cassettes
Work Cell: Sub-Class 1 with zero dead space

Special Features:
Bullet Class 1 Mini-environment enclosing metrology tools & isolation table
Bullet Product routing to either or both metrology stations
Bullet Automated supervisory control of EFEM and metrology tools


Reticle Transfer Tool

Product: Coated and uncoated EUV Reticles
Product Interface: Dual Asyst Load Ports
Carriers: Single-reticle pods and Five-reticle cassettes
Robot: Six-axis Staubli robot
End Effector: Passive, for interfacing with multi-reticle cassettes
Work Cell: Sub-Class 1 with zero dead space

Special Features:
Bullet Ability to fill/empty five-position cassette from/to multiple single pods
Bullet Ability to perform full mix-and-match shuffling between two five-position cassettes
Fala Technologies 430 Old Neighborhood Road Kingston, NY 12401 USA 845-336-4000 Fax: 845-336-4030 www.falatech.com info@falatech.com