VACUUM CHAMBERS
Round or Square
Custom Configurations
Base Pressures to 10-8
GAS DISTRIB / CONTROL
Process Related Gases
Inert Purges
Back Filling
PUMPING
Oil or Dry Roughing
Turbo-Molecular
Cryo-Pumps
PRESSURE CONTROL
Filtered, Inert Gas, Throttling
Pump Throttling
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PRESSURE SENSING
Pirani
Capacitance Manometers
Hot / Cold Cathode
Spinning Rotor
LOAD LOCKS
Multi-Axis
Wafers
Reticles
VACUUM STAGES
Single and Multi Axis
PRODUCT CHUCKS
Active Mechanical
Passive
Electrostatic
Temperature Controlled
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