Fala Technologies High Vacuum, System Design, Build & Test



High Vacuum Systems
A Fala High Vacuum System installed at International Sematech.
FALA Technologies is an experienced developer of custom-designed high vacuum systems for the semiconductor and metrology markets. FALA partners with “best of breed” component and sub-system OEMs to ensure that our customers’ critical requirements are met. Working with these best of breed OEMs has cultivated an extensive resource base of consulting expertise that supports the most demanding and challenging applications. These systems are built by experienced technicians within FALA’s on-site clean rooms and are fully leak-tested to user specifications.

VACUUM CHAMBERS
BulletRound or Square
BulletCustom Configurations
BulletBase Pressures to 10-8

GAS DISTRIB / CONTROL
BulletProcess Related Gases
BulletInert Purges
BulletBack Filling

PUMPING
BulletOil or Dry Roughing
BulletTurbo-Molecular
BulletCryo-Pumps

PRESSURE CONTROL
BulletFiltered, Inert Gas, Throttling
BulletPump Throttling

PRESSURE SENSING
BulletPirani
BulletCapacitance Manometers
BulletHot / Cold Cathode
BulletSpinning Rotor

LOAD LOCKS
BulletMulti-Axis
BulletWafers
BulletReticles

VACUUM STAGES
BulletSingle and Multi Axis

PRODUCT CHUCKS
BulletActive Mechanical
BulletPassive
BulletElectrostatic
BulletTemperature Controlled
Fala Technologies • 430 Old Neighborhood Road • Kingston, NY 12401 • USA • 845-336-4000 • Fax: 845-336-4030 • www.falatech.cominfo@falatech.com